Study on New Technology of Synthesis Silicon? Tetrachloride from Abandoned Catalyst in Direct Synthesis of Tetrachlorosilane

Study on New Technology of Synthesis Silicon? Tetrachloride from Abandoned Catalyst in Direct Synthesis of Tetrachlorosilane

YAN Shi-cheng

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PDF(422 KB)

Journal of Northeast Electric Power University ›› 2010, Vol. 30 ›› Issue (6) : 36-39.

Study on New Technology of Synthesis Silicon? Tetrachloride from Abandoned Catalyst in Direct Synthesis of Tetrachlorosilane

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